Prior Information NoticeTED (EU Publications Office)
Prior Information Notice: Ferdinand-Braun-Institut gGmbH Leibniz-Institut für Höchstfrequenztechnik (Germany)
This is a general procurement pre-announcement; it is not an open invitation to tender. Bidding conditions and dates are set in the official notice the buyer publishes later.
Notice details
- Buyer
- Ferdinand-Braun-Institut gGmbH Leibniz-Institut für Höchstfrequenztechnik
- Country
- Germany
- Published at source
- 21 October 2026
- Notice type
- Prior Information Notice
Original title
Ion beam deposition system(German)
In the source language (German)
The Ferdinand-Braun-Institut (FBH) extends its cleanroom equipment in order to realize pilot-lines for bipolar InP-Chiplets and GaAs Laser Chiplets. The FBH wants to acquire a dual ion beam system for its GaAs Laser Chiplets pilot line in order to increase its coating capabilities as well as increase throughput. The Ion beam system should be able to coat laser bars, laser coupons and PICs that are mounted in jigs and wafers up to a diameter of 200 mm with high quality optical coatings such as Al2O3, TiO2, SiO2 and Ta2O5. Key system specifications • Dual chamber (loadlock and process chamber) system capable of ion beam deposition, ion beam etching and dual ion beam sputtering • High level…Source and licence
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